Atomic Layer Deposition process for highly conductive LiPON for solid-state batteries

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By mmillikinAug 17, 2015, 6:06 am72 pts
Researchers at the University of Maryland have demonstrated the first reported atomic layer deposition (ALD) process for the solid lithium electrolyte lithium phosphorous oxynitride (LiPON). An open access paper on their work is published in the ACS journal Chemical Materials. The ALD process features a…

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